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Manufacture of microfluidic glass chips by deep plasma etching, femtosecond laser ablation, and anodic bonding

✍ Scribed by S. Queste; R. Salut; S. Clatot; J.-Y. Rauch; Chantal G. Khan Malek


Book ID
106185887
Publisher
Springer-Verlag
Year
2010
Tongue
English
Weight
535 KB
Volume
16
Category
Article
ISSN
0946-7076

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