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Manufacture and examination of various spin-on glass films with respect to their humidity-sensitive properties

✍ Scribed by J. Lin; M. Heurich; E. Obermeier

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 207 KB
Volume: 13
Category: Article
ISSN: 0925-4005
DOI: 10.1016/0925-4005(93)85335-8

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