✦ LIBER ✦

Manufacturable MEMS miniSEMs

✍ Scribed by R. Saini; Z. Jandric; J. Gammell; S.A.M. Mentink; D. Tuggle

Book ID: 108207640
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 229 KB
Volume: 83
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2006.01.260

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Manufacturable MEMS microcolumn

✍ R. Saini; Z. Jandric; K. Tsui; T. Udeshi; D. Tuggle 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 326 KB

This paper reports a MEMS-based microassembly process to manufacture electrostatic electron-beam microcolumns using MEMS connectors and sockets. Different microcolumn components, including deflectors, lens elements, and apertures, are fabricated on a highly doped 50 lm thick SOI (Silicon-on-Insulato

Manufacture of MEMS devices

📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 161 KB

Microelectromechanical resonator manufac

Microelectromechanical resonator manufactured using CMOS-MEMS technique

✍ Ching-Liang Dai; Cheng-Hsiung Kuo; Ming-Chao Chiang 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 824 KB

Team works on MEMS and MOEMS manufacture

📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 141 KB

Integrated design of MEMS: aiming at man

Integrated design of MEMS: aiming at manufacturability

✍ Matthieu Museau; Cédric Masclet; Serge Tichkiewitch 📂 Article 📅 2007 🏛 Springer-Verlag 🌐 English ⚖ 471 KB

A manufacturable infrared black body

✍ B. E. Moshkin; S. V. Maksimenko; A. A. Balashov; V. A. Vagin; M. A. Shilov 📂 Article 📅 2010 🏛 Springer 🌐 English ⚖ 163 KB