## Abstract A scanning thermal microscope with a Wollaston probe was used to investigate the spatial distribution and temporal variation of temperature in interconnect structures subjected to thermal cycling. The probe, utilized in passive temperature sensing mode, was calibrated from 20°C to 200°C
Management of spatial and temporal thermal dynamics using TLM
✍ Scribed by A. L. Koay; A. J. Wilkinson; S. H. Pulko
- Publisher
- John Wiley and Sons
- Year
- 2008
- Tongue
- English
- Weight
- 620 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0894-3370
- DOI
- 10.1002/jnm.701
No coin nor oath required. For personal study only.
✦ Synopsis
Abstract
The design of a preliminary spatial thermal control algorithm is described. This is based on the traditional state‐space servo design and exploits the analogy between the transmission line matrix (TLM) method and state‐space. The TLM algorithm involves not only temporal dynamics but also spatial ones. The control algorithm presented here involves estimating an analogous TLM model for the process to be controlled, the states of which are then used to calculate the control signals, across space, to be employed.
The performance of the control algorithm is briefly investigated over a range of design parameter values, in order to seek a preliminary insight into parameter selection. Copyright © 2008 John Wiley & Sons, Ltd.
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