✦ LIBER ✦
Management of AlCl3 in plasma etching aluminum and its alloys : John E. Spencer. Solid St. Technol. 203 (April 1984)
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 130 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0026-2714
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