Mainstream rapid thermal processing for source–drain engineering from first applications to latest results

✍ Scribed by J. Niess; S. Paul; S. Buschbaum; P. Schmid; W. Lerch

• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 410 KB
• Volume: 114-115
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/j.mseb.2004.07.036