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Magnetooptical characterization of multilayers by incident-angle analysis

✍ Scribed by Deeter, M.N.; Sarid, D.


Book ID
114549540
Publisher
IEEE
Year
1988
Tongue
English
Weight
236 KB
Volume
24
Category
Article
ISSN
0018-9464

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## Abstract Samples of polycrystalline silicon (poly‐Si) thin‐film multilayers were prepared by low‐pressure chemical vapor deposition. Analysis of these samples by cross‐sectional transmission electron microscopy (XTEM) revealed large changes in grain size between the undoped–as‐deposited and dope