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Magnetic Properties of Fe-Si-N Films Sputtered in (Ar+N2) Plasma

โœ Scribed by Takahashi, M.; Komaba, H.; Shoji, H.; Shimatsu, T.; Wakiyama, T.


Book ID
119818801
Publisher
Institute of Electrical and Electronics Engineers
Year
1991
Weight
793 KB
Volume
6
Category
Article
ISSN
0882-4959

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