Magnetic properties and internal stresses of thick vapor deposited permalloy films
โ Scribed by Rogalla, D.; Ruh, W.
- Book ID
- 117922008
- Publisher
- IEEE
- Year
- 1973
- Tongue
- English
- Weight
- 482 KB
- Volume
- 9
- Category
- Article
- ISSN
- 0018-9464
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๐ SIMILAR VOLUMES
## Abstract In this study, the relationship among magnetic properties, Aerosol Deposition (AD) conditions, and microstructures in SmโFeโN AD films was investigated. The maximum thickness of 145ยตm was obtained under AD conditions of gas flow rate (__gfr__)=6liters/min for 10 min. The density of SmโF
SiC thick films of about 300 mm could be prepared with a deposition rate above 300 nm/s by thermal plasma physical vapor deposition (TPPVD) using ultrafine SiC powder as a starting material. The thermoelectric properties were investigated as a function of composition and doping content. The nondoped