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Lubrication of silicon micromechanisms by chemical grafting of long-chain molecules

✍ Scribed by P. Cléchet; C. Martelet; M. Belin; H. Zarrad; N. Jaffrezic-Renault; S. Fayeulle

Book ID: 108028231
Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 470 KB
Volume: 44
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(94)00777-2

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