✦ LIBER ✦
LPCVD polycrystalline silicon: growth and physical properties of in-situ phosphorus doped and undoped films : Gunther Harbeke, Liselotte Krausbauer, Edgar F. Steigmeier, Alois E. Widmer, Heinz F. Kappert and Gerd Neugebauer. RCA Rev.44, 287 (June 1983)
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 132 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0026-2714
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