Low voltage electron beam lithography in self-assembled ultrathin films with the scanning tunneling microscope

✍ Scribed by Marrian, C. R. K.; Perkins, F. K.; Brandow, S. L.; Koloski, T. S.; Dobisz, E. A.; Calvert, J. M.

• Book ID: 120709350
• Publisher: American Institute of Physics
• Year: 1994
• Tongue: English
• Weight: 637 KB
• Volume: 64
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.111157