✦ LIBER ✦
Low thermal-budget process of sputtered-PZT capacitor over multilevel metallization
✍ Scribed by Inoue, N.; Nakura, T.; Hayashi, Y.
- Book ID
- 114617210
- Publisher
- IEEE
- Year
- 2003
- Tongue
- English
- Weight
- 656 KB
- Volume
- 50
- Category
- Article
- ISSN
- 0018-9383
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