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Low temperature zirconia thin film synthesis by a chemical vapour deposition process involving ZrCl4 and O2–H2–Ar microwave post-discharges. Comparison with a conventional CVD hydrolysis process
✍ Scribed by J. Gavillet; T. Belmonte; D. Hertz; H. Michel
- Book ID
- 108389064
- Publisher
- Elsevier Science
- Year
- 1997
- Tongue
- English
- Weight
- 298 KB
- Volume
- 301
- Category
- Article
- ISSN
- 0040-6090
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