Low temperature tempering-induced changes in bulk resistivity, temperature coefficient of resistivity and stress in physically vapor-deposited TiN

✍ Scribed by Craig Ernsberger; A.J. Perry; L.P. Lehman; A.E. Miller; A.R. Pelton; B.W. Dabrowski

• Book ID: 107929991
• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 721 KB
• Volume: 36
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(88)90003-5