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Low Temperature Surface Conductivity of Hydrogenated Diamond

✍ Scribed by Sauerer, C. ;Ertl, F. ;Nebel, C.E. ;Stutzmann, M. ;Bergonzo, P. ;Williams, O.A. ;Jackman, R.A.

Publisher
John Wiley and Sons
Year
2001
Tongue
English
Weight
136 KB
Volume
186
Category
Article
ISSN
0031-8965

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## Abstract For Abstract see ChemInform Abstract in Full Text.

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The combination of photolithography, e-beam lithography and atomic force microscopy (AFM) techniques is used for local oxidation of hydrogen terminated surfaces with a resolution down to % 10 nm. Lithographic masks are used for treatment in oxygen plasma. In AFM the surface can be oxidized directly