Low-temperature Si(100) etching: facile abstraction of SiH3(a) by thermal hydrogen atoms

✍ Scribed by S.K. Jo; B. Gong; G. Hess; J.M. White; J.G. Ekerdt

• Book ID: 117217913
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 473 KB
• Volume: 394
• Category: Article
• ISSN: 0039-6028
• DOI: 10.1016/s0039-6028(97)00801-7