✦ LIBER ✦
Low temperature selective epitaxial growth of SiGe layers using various dielectric mask patterns and process conditions
✍ Scribed by A-Ram Choi; Sang-Sik Choi; Jin-Tae Kim; Deok-Ho Cho; Tae-Hyun Han; Kyu-Hwan Shim
- Book ID
- 104002392
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 732 KB
- Volume
- 254
- Category
- Article
- ISSN
- 0169-4332
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