Low temperature rapid thermal low pressure chemical vapor deposition of 〈111〉 oriented TiN layers from the TiCl4NH3H2 gaseous phase

✍ Scribed by A. Bouteville; L. Imhoff; J.C. Remy

• Book ID: 114155700
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 294 KB
• Volume: 37-38
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(97)00141-x