Low temperature process for preparing a diamond-like-carbon film from graphite by H2-gas chemical sputtering

✍ Scribed by Akio Hiraki; Youichi Kawakami; Toshifumi Kawano; Masao Hayashi; Masao Tokumura; Tatsuro Miyasato

• Book ID: 113277130
• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 247 KB
• Volume: 7-8
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(85)90416-1