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Low temperature Pd/SnO2 sensor for carbon monoxide detection

โœ Scribed by Kim, Beomseok; Lu, Yijiang; Hannon, Ami; Meyyappan, M.; Li, Jing


Book ID
122026011
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
860 KB
Volume
177
Category
Article
ISSN
0925-4005

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A new SnO2 low temperature deposition te
โœ V. Demarne; A. Grisel ๐Ÿ“‚ Article ๐Ÿ“… 1993 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 654 KB

A new Sn02 low temperature deposition technique for integrated gas sensors is presented. Two different film thicknesses are investigated, as well as different catalysts . A correlation is established between the deposition parameters, the texture of the layers and the gas sensitivities . An explanat