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Low-Temperature Nitridation of Iron Layers in NH3-H2 Mixtures

โœ Scribed by du Marchie van Voorthuysen, E.H. ;Feddes, B. ;Chechenin, N.G. ;Inia, D.K. ;Vredenberg, A.M. ;Boerma, D.O.

Publisher
John Wiley and Sons
Year
2000
Tongue
English
Weight
184 KB
Volume
177
Category
Article
ISSN
0031-8965

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Thermal Stability of MOCVD and HVPE GaN
Thermal Stability of MOCVD and HVPE GaN Layers in H2, HCl, NH3 and N2
โœ Mastro, M.A. ;Kryliouk, O.M. ;Reed, M.D. ;Anderson, T.J. ;Davydov, A. ;Shapiro, ๐Ÿ“‚ Article ๐Ÿ“… 2001 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 253 KB ๐Ÿ‘ 1 views

This work represents a complete study of GaN annealed in H 2 , HCl, NH 3 and N 2 . The GaN thermal behavior was evaluated by comparison of MOCVD and HVPE samples. The MOCVD films were found to obey a dissociative sublimation mechanism with only gaseous species forming, while the HVPE films reacted w