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Low-temperature metal-induced crystallization of Mn-containing amorphous Ge thin films

โœ Scribed by F.A. Ferri


Book ID
116672911
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
515 KB
Volume
358
Category
Article
ISSN
0022-3093

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๐Ÿ“œ SIMILAR VOLUMES


Microwave-induced low-temperature crysta
โœ Jin Hyung Ahn; Jeong No Lee; Yoon Chang Kim; Byung Tae Ahn ๐Ÿ“‚ Article ๐Ÿ“… 2002 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 158 KB

Microwave heating was utilized for low-temperature crystallization of amorphous Si (a-Si) films. Microwave heating lowered the annealing temperature and reduced the annealing time. By microwave heating the hydrogen in the amorphous films was diffused out long before the nucleation of polycrystalline