Low-temperature interface modification by hydrocarbon radicals in heteroepitaxy of 3C-SiC on Si clean surface

✍ Scribed by Tomoaki Hatayama; Norihiro Tanaka; Takashi Fuyuki; Hiroyuki Matsunami

• Book ID: 107457520
• Publisher: Springer US
• Year: 1997
• Tongue: English
• Weight: 542 KB
• Volume: 26
• Category: Article
• ISSN: 0361-5235
• DOI: 10.1007/s11664-997-0143-3