Low temperature impurity diffusion in SiC: Planar quantum-size p-n junctions and n-p-n transistor structures

✍ Scribed by N.T. Bagraev; L.E. Klyachkin; V.L. Sukhanov

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 505 KB
• Volume: 36
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(93)90221-b