✦ LIBER ✦
Low temperature identification of interfacial and bulk defects in Al/SiO2/Si capacitor structures by electron beam induced current
✍ Scribed by Kirk, H.R.; Radzimski, Z.; Buczkowski, A.; Rozgonyi, C.A.
- Book ID
- 114535735
- Publisher
- IEEE
- Year
- 1994
- Tongue
- English
- Weight
- 744 KB
- Volume
- 41
- Category
- Article
- ISSN
- 0018-9383
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