✦ LIBER ✦
Low temperature high density Si3N4 MIM capacitor technology for MMMIC and RF-MEMs applications
✍ Scribed by K. Elgaid; H. Zhou; C.D.W. Wilkinson; I.G. Thayne
- Book ID
- 113797657
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 156 KB
- Volume
- 73-74
- Category
- Article
- ISSN
- 0167-9317
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