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Low temperature growth of carbon nanotubes on Si substrates in high vacuum

โœ Scribed by Tanioku, Kenji; Maruyama, Takahiro; Naritsuka, Shigeya


Book ID
121312394
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
662 KB
Volume
17
Category
Article
ISSN
0925-9635

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Carbon nanotubes (CNTs) were grown on diamond-coated Si substrates and free-standing diamond wafers to develop efficient thermal interface materials for thermal management applications. High-quality, translucent, free-standing diamond substrates were processed in a 5 kW microwave plasma chemical vap