✦ LIBER ✦
Low temperature fast growth of nanocrystalline silicon films by rf-PECVD from SiH 4 /H 2 gases: microstructural characterization
✍ Scribed by Chen, Cheng-Zhao; Qiu, Sheng-Hua; Liu, Cui-Qing; Wu, Yan-Dan; Li, Ping; Yu, Chu-Ying; Lin, Xuan-ying
- Book ID
- 118155123
- Publisher
- Institute of Physics
- Year
- 2008
- Tongue
- English
- Weight
- 724 KB
- Volume
- 41
- Category
- Article
- ISSN
- 0022-3727
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