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Low temperature epitaxy of Au on ZnO

โœ Scribed by E.F. Wassermann; K.A. Polacek


Book ID
118980140
Publisher
Elsevier Science
Year
1971
Tongue
English
Weight
758 KB
Volume
28
Category
Article
ISSN
0039-6028

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Epitaxial ZnO films grown by RF-assisted
โœ B.M. Ataev; V.V. Mamedov; A.K. Omaev; B.A. Magomedov ๐Ÿ“‚ Article ๐Ÿ“… 2003 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 233 KB

A low-temperature modification of the Chemical vapor deposition (CVD) growth with the RF-discharge plasma generated in CVD reactor during the growth process has been reported. This method allows us to significantly increase the effective pressure of atomic oxygen during the deposition, and to shift