Low Temperature Dry Etching of Graphite Anodes in Hydrogen Glow Discharges

✍ Scribed by J. Nawra; S. Pfau; A. Resztak; Th. Richter; A. Rutscher

• Publisher: John Wiley and Sons
• Year: 1991
• Tongue: English
• Weight: 117 KB
• Volume: 31
• Category: Article
• ISSN: 0005-8025
• DOI: 10.1002/ctpp.2150310305

✦ Synopsis

Low Temperature Dry Etching of Graphite Anodes in Hydrogen Glow Discharges J. N A ~R A (a), S. PFAU (b), A. RESZTAK (a), TH. RICHTER (b), A. RUTSCHER (b)