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Low temperature diffusion study of Xe implanted into a photoresist film

✍ Scribed by M. Behar; L. Amaral; J.R. Kaschny; F.C. Zawislak


Book ID
103782216
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
266 KB
Volume
148
Category
Article
ISSN
0375-9601

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