✦ LIBER ✦
Low temperature deposition of SiO2 and PSG using SiH4, N2O and phosphorous vapour for damage-free passivation of InP-based PIN diodes by plasma- and photo-assisted LPCVD
✍ Scribed by R. Riemenschneider; N. DasGupta; R. Schütz; H.L. Hartnagel; H. Kräutle
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 315 KB
- Volume
- 69
- Category
- Article
- ISSN
- 0169-4332
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