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Low temperature deposition of glass membranes for gas sensors

โœ Scribed by P. Althainz; A. Dahlke; J. Goschnick; H.J. Ache

Book ID
107864535
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
370 KB
Volume
241
Category
Article
ISSN
0040-6090

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A new Sn02 low temperature deposition technique for integrated gas sensors is presented. Two different film thicknesses are investigated, as well as different catalysts . A correlation is established between the deposition parameters, the texture of the layers and the gas sensitivities . An explanat