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Low-temperature damage formation in ion-implanted SiC and its correlation with primary energy deposition

✍ Scribed by Wendler, E.; Schilling, M.; Wendler, L.


Book ID
122961928
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
916 KB
Volume
105
Category
Article
ISSN
0042-207X

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