Low-temperature crystallization of amorphous silicon using Cu field-aided lateral crystallization at 350°C

✍ Scribed by Kyoung-Wan Park; Ki-Taek Cho; Jin-Yong Ahn; Duck-Kyun Choi

• Book ID: 107453268
• Publisher: Springer US
• Year: 2004
• Tongue: English
• Weight: 154 KB
• Volume: 33
• Category: Article
• ISSN: 0361-5235
• DOI: 10.1007/s11664-004-0242-3