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Low-stress physical vapor growth (PVT)

✍ Scribed by F. Rosenberger; G.H. Westphal


Book ID
103164045
Publisher
Elsevier Science
Year
1978
Tongue
English
Weight
388 KB
Volume
43
Category
Article
ISSN
0022-0248

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Prepared Low Stress Cubic Boron Nitride
✍ P.W. Zhu; Y.N. Zhao; B. Wang; Z. He; D.M. Li; G.T. Zou πŸ“‚ Article πŸ“… 2002 πŸ› Elsevier Science 🌐 English βš– 158 KB

We present low stress cubic boron nitride (cBN) films with a transition layer deposited on the metal alloy substrates by tuned substrate radio-frequency magnetron sputtering. The films were characterized by Fourier transform infrared spectroscopy and transmission electron microscopy (TEM). The IR pe