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Low resistivity and high mobility tin-doped indium oxide films

✍ Scribed by I.A. Rauf

Book ID
119125035
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
409 KB
Volume
18
Category
Article
ISSN
0167-577X

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πŸ“œ SIMILAR VOLUMES

Low temperature processing of high condu
Low temperature processing of high conductivity and high transparency indium–tin-oxide/Ag alloy/indium–tin-oxide multilayered thin films
✍ Zuqiang Qi; Xuekang Chen; Chuizhen Fan; Weiping Chai πŸ“‚ Article πŸ“… 2009 πŸ› Elsevier Science 🌐 English βš– 425 KB

Indium-tin-oxide (ITO) thin films and ITO/Ag alloy/ITO multilayered thin films were deposited on glass substrates using a vertical in-line multilayer sputtering system. Ceramic ITO targets were used for the deposition of ITO layers at low substrate temperature of 100 β€’ C. It was observed that the s