✦ LIBER ✦
Low resistive tungsten dual poly-metal gates with multi-diffusion barrier metals in high performance memory devices
✍ Scribed by Min-Gyu Sung; Yong Soo Kim; Sook Joo Kim; Ii-Kyo Jeong; Hak-Soon Choi; Moon-Su Kim; Heonho Kim; Sung-Ki Park
- Book ID
- 113916068
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 884 KB
- Volume
- 69
- Category
- Article
- ISSN
- 0038-1101
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