Low resistance, thermally stable Au/Pt/Ti/WSiN ohmic contacts on n+-InGaAs/n-GaAs layer systems

✍ Scribed by E. Nebauer; M. Mai; E. Richter; J. Würfl

• Book ID: 107457705
• Publisher: Springer US
• Year: 1998
• Tongue: English
• Weight: 109 KB
• Volume: 27
• Category: Article
• ISSN: 0361-5235
• DOI: 10.1007/s11664-998-0100-9