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Low-pressure hollow-cathode glow discharge plasma for broad beam gaseous ion source

✍ Scribed by Oks, Efim M.; Vizir, Alexey V.; Yushkov, George Yu.


Book ID
115486845
Publisher
American Institute of Physics
Year
1998
Tongue
English
Weight
297 KB
Volume
69
Category
Article
ISSN
0034-6748

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