✦ LIBER ✦
Low pressure acoustic sensors for airborne sound with piezoresistive monocrystalline silicon and electrochemically etched diaphragms
✍ Scribed by R. Schellin; M. Strecker; U. Nothelfer; G. Schuster
- Book ID
- 103959524
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 394 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0924-4247
No coin nor oath required. For personal study only.