Low open-area endpoint detection using a PCA-based T/sup 2/ statistic and Q statistic on optical emission spectroscopy measurements

✍ Scribed by White, D.A.; Goodlin, B.E.; Gower, A.E.; Boning, D.S.; Chen, H.; Sawin, H.H.; Dalton, T.J.

• Book ID: 120229847
• Publisher: IEEE
• Year: 2000
• Tongue: English
• Weight: 442 KB
• Volume: 13
• Category: Article
• ISSN: 0894-6507
• DOI: 10.1109/66.843635