Low-loss microwave filters on CMOS-grade standard silicon substrate with low-k BCB dielectric
✍ Scribed by Lydia L. W. Leung; Kevin J. Chen; Xiao Huo; Philip C. H. Chan
- Publisher
- John Wiley and Sons
- Year
- 2003
- Tongue
- English
- Weight
- 121 KB
- Volume
- 40
- Category
- Article
- ISSN
- 0895-2477
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✦ Synopsis
Abstract
Benzocyclobutene (BCB), a low‐k, photosensitive, easily patterned material is used as the interfacing layer that isolates the passive components from the lossy, low‐resistivity silicon. Its performance is further improved by reducing the conductive loss with an electroplated and highly‐conductive metal, namely, copper. Standard 50‐Ω microstrip lines and a microstrip‐transmission‐line‐based microwave filter, exhibiting insertion losses of 0.8 dB and 1.1 dB at 10 GHz, respectively, are demonstrated. © 2004 Wiley Periodicals, Inc. Microwave Opt Technol Lett 40: 9–11, 2004; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.11271