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Low-loss Al2O3waveguides produced by pulsed laser deposition at room temperature

✍ Scribed by A. Suárez-García; J. Gonzalo; C.N. Afonso

Publisher
Springer
Year
2003
Tongue
English
Weight
493 KB
Volume
77
Category
Article
ISSN
1432-0630

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Undoped ZnO, Al-doped ZnO (AZO) and Ga-doped ZnO (GZO) thin films were deposited on silica glass substrate at room temperature in a vacuum by KrF excimer laser (λ = 248 nm) pulsed laser deposition method. The transparency of ZnO thin films showed the dependence on deposition area. The relationship b