Low leakage and high performance of nMOSFET using SiGe layer as a diffusion barrier

✍ Scribed by Bongki Mheen; Young-Joo Song; Jin-Young Kang; Kyu-Hwan Shim; Songcheol Hong

• Book ID: 103846315
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 223 KB
• Volume: 7
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/j.mssp.2004.09.013