✦ LIBER ✦
Low frequency planar plasma etching of polycide structures in an SF6 glow discharge : M. E. Coe and S. H. Rogers. Solid St. Technol., 79 (August 1982)
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 115 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0026-2714
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