Low energy sputtering of resistive films : Edward M. Michalak, Vacuum17, No. 6 (1967), p. 317

• Publisher: Elsevier Science
• Year: 1968
• Tongue: English
• Weight: 101 KB
• Volume: 7
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(68)90286-2