Low energy ion‐assisted deposition of titanium nitride ohmic contacts on alpha (6H)‐silicon carbide

✍ Scribed by Glass, R. C.; Spellman, L. M.; Davis, R. F.

• Book ID: 111938592
• Publisher: American Institute of Physics
• Year: 1991
• Tongue: English
• Weight: 641 KB
• Volume: 59
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.105836