✦ LIBER ✦
Low energy deposition of InGaZnO channel layer using linear facing target sputtering for oxide TFTs
✍ Scribed by Shin, Hyun-Su; Choi, Kwang-Hyuk; Kim, Han-Ki
- Book ID
- 125466792
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 869 KB
- Volume
- 12
- Category
- Article
- ISSN
- 1567-1739
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